Fundamentals of Micro and Nanofabrication

Course Description: 

Discussion of the fundamentals of microfabrication techniques as applied to micro-electro-mechanical system (MEMS) and nano-electro-mechanical systems (NEMS). Study of photolithography, subtractive and additive techniques, surface and bulk micromachining, soft lithography and non-conventional fabrication techniques. Hands-on laboratory experience on mask design, photolithography, surface micromachining and soft lithography.

Course Objectives:

1. Grasp the process of photolithography.
   
2. Describe subtractive and additive pattern transfer processes.
   
3. Describe and compare bulk and surface micromachining.
4.  Describe and compare non-conventional fabrication technologies.
5. Create micro-devices based on photolithography.
6. Apply the theory in the laboratory.